Optical characterization of ALD-coated nanoporous alumina structures: effect of sample geometry or coated layer material

dc.contributor.author	Cuevas, A. L.
dc.contributor.author	Vega V.
dc.contributor.author	Domínguez, A.
dc.contributor.author	González García, Ana Silvia
dc.contributor.author	Prida Pidal, Víctor Manuel de la
dc.contributor.author	Benavente, J.
dc.date.accessioned	2023-08-28T09:42:04Z
dc.date.available	2023-08-28T09:42:04Z
dc.date.issued	2023
dc.identifier.citation	Micromachines, 14(4) (2023); doi:10.3390/mi14040839
dc.identifier.issn	2072-666X
dc.identifier.uri	https://hdl.handle.net/10651/69433
dc.description.sponsorship	This research was funded by the Spanish MCI under grant number PID2019-108075RB-C32/AEI/10.13039/501100011033.
dc.language.iso	eng
dc.relation.ispartof	Micromachines
dc.rights	© 2023 Los autores
dc.rights	CC Reconocimiento 4.0 Internacional
dc.rights.uri	http://creativecommons.org/licenses/by/4.0/
dc.source	Scopus
dc.source.uri	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85156154295&doi=10.3390%2fmi14040839&partnerID=40&md5=dea8ee5c39cced68c932335996848e01
dc.title	Optical characterization of ALD-coated nanoporous alumina structures: effect of sample geometry or coated layer material
dc.type	journal article
dc.identifier.doi	10.3390/mi14040839
dc.relation.projectID	MCI/PID2019-108075RB-C32
dc.relation.publisherversion	http://dx.doi.org/10.3390/mi14040839
dc.rights.accessRights	open access
dc.type.hasVersion	VoR

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